| [学術論文]
[1]伊藤,藤岡, Century;mso-hansi-font-family:Century">鉄車輪における空転前駆時の振動発生機構,"日本機械学会論文集(C編)
52巻477号,
pp. 1550-1556, 1986.
[2]伊藤,藤岡,井口, "ディジタルフィルタによる空転前駆現象の検知,"日本機械学会論文集(C編)
52巻476号,
pp. 1344-1350, 1986.
[3]
T. Ito, T. Fujioka, and M. Iguchi, "The digital filter for optimum adhesion
control of rolling stocks," Bulletin of JSME, Vol. 29, No. 258, pp. 4370-4374,
1986.
[4]伊藤,進藤, "二つのマニピュレータのためのスケジューリング,"計測自動制御学会論文集,
Vol. 26, No. 4, pp. 108-115, 1990.
[5]
T. Ito, T. Takeda, and S. Nakajima, "Database with LSI failure analysis
navigator," IEICE Trans. Electron., Vol. E79-C, No. 3, pp. 272-276, 1996.
[6]
E. Higurashi, R. Sawada, and T. Ito, "Optically induced rotation of a trapped
micro-object about an axis perpendicular to the laser beam axis," Appl.
Phys. Lett., Vol. 72, No. 23, pp. 2951-2953, 1998.
[7]
E. Higurashi, R. Sawada, and T. Ito, "Axial and lateral displacement measurements
of a microsphere based on the critical-angle method," Jpn. J. Appl. Phys.,
Vol. 37, pp. 4191-4196, 1998.
[8]
E. Higurashi, R. Sawada, and T. Ito, "Optically induced angular alignment
of birefringent micro-object by linear polarization," Appl. Phys. Lett.,
Vol. 73, No. 21, pp. 3034-3036, 1998.
[9]
T. Ito, R. Sawada, and E. Higurashi, "Integrated microlaser Doppler velocimeter,"
IEEE Journal of Lightwave Technology, Vol. 17, No. 1, pp. 30-34, 1999.
[10]
E. Higurashi, R. Sawada, and T. Ito, "Optically induced angular alignment
of trapped birefringent micro-objects by linearly polarized light," Phys.
Rev. E, Vol. 59, No. 3, pp. 3676-3681, 1999.
[11]
E. Higurashi, R. Sawada, and T. Ito, "Monolithically integrated optical
displacement sensor based on triangulation and optical beam deflection,"
Appl. Opt., Vol. 38, No. 9, pp. 1746-1751, 1999.
[12]
E. Higurashi, R. Sawada, and T. Ito, "Nanometer-displacement detection
of optically trapped metallic particles based on critical angle method
for small force detection," Rev.
Sci. Instrum., Vol. 70, No. 7, pp. 3068-3073, 1999.
[13]
R. Sawada, J. Shimada, E. Higurashi, and T. Ito, "Integrated micro focusing
and tracking sensor," J. Micromech. Microeng., 9, pp. 71-77, 1999.
[14]
R. Sawada, E. Higurashi, T. Ito, O. Ohguchi, and M. Tsubamoto, "Monolithic-integrated
micro-laser encoder," Appl. Opt., Vol. 38, No. 33, pp. 6866-6873, 1999.
[15]
T. Ito, R. Sawada, and E. Higurashi, "Fabrication of micro IC probe for
LSI testing," Sensors and Actuators, A physical, 80, pp. 126-131, 2000.
[16]
T. Ito, R. Sawada, E. Higurashi, T. Kiyokura, "Fabrication of microstructure
using fluorinated polyimide and silicone-based positive photoresist," Microsystem
Technologies, Vol. 6, No. 5, pp.165-168, 2000.
[17]
T. Kiyokura, T. Ito, and R. Sawada, "Prism interferometer for a compact
Fourier-transform spectroscope," Optics Letters, Vol. 25, No. 12, pp. 893-895,
2000.
[18]
E. Higurashi, R. Sawada, and T. Ito, "Optically driven angular alignment
of microcomponents made of in-plane birefringent polyimide film based on
optical angular momentum transfer," J. Micromech. Microeng., 11, pp. 140-145,
2001.
[19] R. Sawada, E. Higurashi, and T. Ito, "High accurate and quick
bonding of a laser-diode chip onto a planar lightwave circuit," Prec.
Eng., 25, pp. 293-300, 2001.
[20] T. Kiyokura, T. Ito, and R. Sawada, "Small Fourier transform
spectroscope using an integrated prism-scanning interferometer," Applied
Spectroscopy, Vol. 55, No. 12, pp. 1628-1633, 2001.
[21]
R. Sawada, E. Higurashi, and T. Ito, "Micro-laser displacement sensor,"
J. Micromech. Microeng., 12, pp. 286-290, 2002.
[国際会議論文]
[1]T.
Fujioka, M. Iguchi, and T. Ito, "Optimum adhesion control of traction motors
by a digital filter," Proceedings 10th International Association for Vehicle
System Dynamics Symposium, Prague, CSSR, pp.113-116, 1987.
[2]T.
Ito and A. Shindo, "Motion planning in a multimanipulator coordination
system," The International conference on advanced mechatronics, Tokyo,
pp. 409-414, 1989.
[3]
T Ito, T. Takeda, and S. Nakajima, "A database with an LSI faluar analysis
navigator," Proceedings of the 20th International Symposium
for Testing and Failure Analysis (ISTFA ’94), Los Angeles, California,
pp. 189-194, 1994.
[4]
R. Sawada, E. Higurashi, T. Ito, M. Tsubamoto, and O. Ohguchi, "Integrated
micro-laser displacement sensor," Proc. IEEE Micro Electro Mechanical Systems
’97, Nagoya, pp. 19-24, 1997.
[5]
T. Ito, R. Sawada, and E. Higurashi, "Integrated Micro Laser Doppler Velocimeter,"
Technical Digest International Conference on Optical MEMS and Their Applications
(MOEMS ’97), Nara, pp. 29-32, 1997.
[6]
R. Sawada, J. Shimada, T. Ito, E. Higurashi, M. Tsubamoto, and O. Ohguchi,
"Integrated micro focusing and tracking sensors," Technical Digest International
Conference on Optical MEMS and Their Applications (MOEMS ’97), Nara, pp.
29-32, 1997.
[7]
E. Higurashi, R. Sawada, and T. Ito, "Alignment and orientation of birefringent
micro-objects using optical radiation pressure of linearly polarized laser
beams," Technical Digest International Conference on Optical MEMS and Their
Applications (MOEMS ’97), Nara, pp. 29-32, 1997.
[8]
T. Ito, R. Sawada, and E. Higurashi, "Micro IC Probe for LSI Testing,"
Technical Digest Twelfth IEEE International Conference on Micro Electro
Mehanical Systems (MEMS ’99), Orlando, Florida, pp. 263-266, 1999.
[9]
E. Higurashi, R. Sawada, and T. Ito, "Assembly and angular alignment of
micro-optical components using a linearly polarized light," Transducers
’99, Sendai, pp. 390-391, 1999.
[10]
T. Ito, R. Sawada, E. Higurashi, and T. Kiyokura, "Fabrication of microstructure
using fluorinated polyimide and silicone-based positive photoresist," HARMST
’99, Chiba, pp. 98-99, 1999.
[11]
R.Sawada, E. Higurashi, and T. Ito, "Etalon combing silicon waveguide and
silicon plate," Proceedings of 3rd International Conference on Micro Opto
Electro Mechanical Systems (MOEMS ’99), Mainz, Germany, pp. 140-144, 1999.
[12]
T. Kiyokura, T. Ito, and R. Sawada, "New interferomter design for a compact
optical spectrum analyzer based on Fourier transform spectroscopy," OSA
Annual Meeting, Santa Clara, California, p. 122, 1999.
[13]
T. Kiyokura, T. Ito, and R. Sawada,"A prism interferometer for a compact
optical spectrum analyzer," Fifth Optoelectronics and Communications Conference
(OECC 2000), Chiba, pp.378-379, 2000.
[14]
R. Sawada, E. Higurashi, and T. Ito, "An accelerometer incorporating a
micro-laser encoder for a wide measureable range," Proceedings of the 2000
IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, pp.
145-146, 2000.
[15]
T. Kiyokura, T. Ito, and R. Sawada, " Small FTIR system using a prism-scanning
interferometer," PITTCON 2001, New Orleans, 1135, 2001.
[16]
R. Sawada, E. Higurashi, A. Shimizu, T. Ito, and O. Ohguchi, "Accelerometer
fabricated using SODIC substrate and micro-laser encoder," Proceedings
of the 2001 IEEE/LEOS International Conference on Optical MEMS, Okinawa,
Japan, 2001.
[17]
E. Higurashi, R. Sawada, and T. Ito, "An Integrated laser Doppler blood
flowmeter for a wearable health monitoring system," Proceedings of the
2001 IEEE/LEOS International Conference on Optical MEMS, Okinawa, Japan,
2001.
[レター]
[1]伊藤,輿水,松井,澤田,
"SPP(Silicone-based Positive Photoresist)マスクによるポリイミドの三次元立体加工,"電気学会論文誌E（センサ・マイクロマシン部門誌）,
Vol. 11 E, No. 1, pp. 57-58, 1997.
[学会発表等]
[1]伊藤,藤岡,井口,久山,ディジタルフィルタによる空転前駆現象の検知,"日本機械学会講演論文集 No. 840-16 (’84-11-12,東京,第12回技術講演会・Guideway
Vehicle Dynamics), pp. 61-64, 1984.
[2]伊藤,藤岡,井口,久山,木曽,
"鉄車輪における空転前駆時の振動発生機構,"日本機械学会講演論文集 No. 840-16 (’84-11-12,東京,第12回技術講演会・Guideway
Vehicle Dynamics), pp. 65-68, 1984.
[3]伊藤,進藤,
"二つのマニピュレータのためのスケジューリング,"第30回自動制御連合講演会(62.10.1〜3),
3025, pp. 417-418, 1987.
[4]伊藤,黒田,
"オブジェクト指向表現を用いたLSI移送コントローラ,"第２回ロボティクス・自動化シンポジウム(2.4.10〜11),
pp. 139-142, 1990.
[5]伊藤,竹田,中島,
"ナビゲーション機能を持つLSI故障解析データベース,"日本学術振興会荷電粒子ビームの工業への応用第132委員会第128回研究会資料(6.12.8〜9),
pp. 5-10, 1994.
[6]日暮,澤田,伊藤,
"光トラップした微粒子の臨界角法による微小変位検出,"春季第44回応用物理学関係連合講演会講演予稿集,
28p-ZP-3, p. 869, 1997.
[7]伊藤,澤田,日暮,
"SPP(Silicone-based Positive Photoresist)マスクによるポリイミドの高アスペクト比加工",平成９年度電気学会全国大会,
p. 3-250, 1997.
[8]
E. Higurashi, R. Sawada, and T. Ito, "Measurement of displacement of microparticle
based on the internal-reflection effect in critical angle prism," OSA Annual
Meeting, FJ2, p. 169, 1997.
[9]日暮,澤田,伊藤,
"金属微小球からの反射光を用いた臨界角法に基づく高感度変位計測,"秋季第58回応用物理学会学術講演会講演予稿集,
3a-L-3, p. 951, 1997.
[10]日暮,澤田,伊藤,
"高複屈折率を有するマイクロ物体の角度アラインメント,"春季第45回応用物理学関係連合講演会講演予稿集,
30p-K-3, p. 1015, 1998.
[11]伊藤,澤田,日暮,清倉,
"フッ素化ポリイミドとSPPを用いた高アスペクト比加工,"電気学会センサ・マイクロマシン研究会資料,
MM-98-16, pp. 13-16, 1998.
[12]日暮,澤田,伊藤,
"三角測量、光てこに基づく光学式マイクロ変位センサ,"秋季第59回応用物理学会学術講演会講演予稿集,
16a-ZC-6, p. 881, 1998.
[13]伊藤,澤田,日暮,清倉,
"集積型マイクロ変位センサを用いたレーザドップラ速度計測",電気学会センサ・マイクロマシン部門総合研究会資料,
MM-98-25, pp. 19-22, 1998.
[14]澤田,伊藤,日暮,
"圧電素子変位の拡大機構と集積型変位センサを組込んだ３次元ステージの製作,"第10回電磁力学関連のダイナミクスシンポジウム,
pp. 481-482, 1998.
[15]日暮,澤田,伊藤,
"光の角運動量によるマイクロ部品の角度アラインメント,"平成11年電気学会全国大会講演論文集,
p. 3-235, 1999.
[16]伊藤,
"集積型光マイクロセンサ, "第６回三次元構造マイクロ機能化センサ調査専門委員会講演(11.6.18),
1999.
[17]清倉,伊藤,澤田,
"小型フーリエ変換分光器のための屈折率走査型マイケルソン干渉計",秋季第60回応用物理学会学術講演会講演予稿集,
2p-M-6, p. 868, 1999.
[18]日暮,澤田,伊藤,
"光の角運動量によるマイクロ部品の角度アラインメント,"
1999年度精密工学会秋季大会学術講演会講演論文集,
I16, p. 351, 1999.
[19]日暮,澤田,伊藤,
"光トラップしたマイクロ光部品の角度アラインメントを光駆動,"電気学会マイクロマシン研究会,
MM-99-21, pp. 47-50, 1999.
[20]伊藤,澤田,日暮,清倉,
"フッ素化ポリイミドを用いたマイクロ構造体の三次元立体加工",日本機会学会第９回設計工学・システム部門講演会講演論文集,
pp. 47-50, 1999.
[21]伊藤,澤田,日暮,
"LSIテスト用ICプローブ",電子情報通信学会技術研究報告,
Vol. 99, No. 456, EMD 99-65 [機能デバイス],
pp. 21-26, 1999.
[22]清倉,伊藤,澤田,
"小型フーリエ変換分光器のためのプリズム干渉計",第24回光波センシング技術研究会講演論文集,
pp. 155-160, 1999.
[23]清倉,伊藤,澤田,
"携帯型フーリエ変換分光器のためのプリズム走査型干渉計の新しいデザイン,"春季第47回応用物理学関係連合講演会講演予稿集,
30a-Z-7, p. 1012, 2000.
[24]清倉,伊藤,澤田,
"プリズム走査型干渉計を用いた携帯型フーリエ変換分光分析装置,"秋季第61回応用物理学会学術講演会講演予稿集,
6a-D-2, 2000.
[25]清倉,伊藤,澤田,
"一体型プリズム走査干渉計を用いた携帯フーリエ変換分光器",電気学会フィジカルセンサ研究会資料,
PHS-00-5, pp. 21-25, 2000.
[26]澤田,日暮,伊藤,
"光集積マイクロエンコーダを内蔵した広範囲測定可能な高精度マイクロ加速度センサ,"秋季第61回応用物理学会学術講演会講演予稿集,
6p-A-2, p. 119, 2000.
[27]清倉,伊藤,澤田,
"一体型プリズム走査干渉計を用いた超小型FTIR,"日本分光学会秋季講演会,
2000.
[28]日暮,澤田,伊藤,
"ウェアラブル生体情報システムのための集積型マイクロ血流計の開発,"
秋季第62回応用物理学会学術講演会講演予稿集,
11a-ZA-11, p. 978, 2001.
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